Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology

by YEONG SAI HOOI
Published 2011

Localized anneal

by TAN, DEXTER, LIM, CHEE CHONG, YEONG, SAI HOOI, NG, CHEE MANG
Published 2012

Method for fabricating semiconductor devices with reduced junction diffusion

by COLOMBEAU, BENJAMIN, YEONG, SAI HOOI, BENISTANT, FRANCIS, INDAJANG, BANGUN, CHAN, LAP
Published 2012

Method for forming a shallow junction region using defect engineering and laser annealing

by ONG, KUANG KIAN, YEONG, SAI HOOI, PEY, KIN LEONG, CHAN, LAP, CHONG, YUNG FU
Published 2012

Method for fabricating semiconductor devices with shallow diffusion regions

by TAN, DEXTER XUEMING, COLOMBEAU, BENJAMIN, ONG, CLARK KUANG KIAN, YEONG, SAI HOOI, NG, CHEE MANG, PEY, KIN LEONG
Published 2012