Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing

由 CHONG YUNG FU
出版 2011

Method to form MOS transistors with shallow junctions using laser annealing

由 CHONG, YUNG FU, PEY, KIN LEONG, SEE, ALEX, WEE, ANDREW THYE SHEN
出版 2012

Method for forming a shallow junction region using defect engineering and laser annealing

由 ONG, KUANG KIAN, YEONG, SAI HOOI, PEY, KIN LEONG, CHAN, LAP, CHONG, YUNG FU
出版 2012

Incorporation of dielectric layer onto SThM tips for direct thermal analysis

由 HU, CHANG CHAUN, PEY, KIN LEONG, CHONG, YUNG FU, KIN, CHIM WAI, NEUZIL, PAVEL, CHAN, LAP
出版 2012