Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples

by Wong, W.K., Rau, E.I., Thong, J.T.L.
Published 2014

Improvements to the design of an electrostatic toroidal backscattered electron spectrometer for the scanning electron microscope

by Rau, E.I., Khursheed, A., Gostev, A.V., Osterberg, M.
Published 2014

Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and...

by Rau, E.I., Gostev, A.V., Shiqiu, Z., Phang, D., Chan, D., Thong, D., Wong, W.
Published 2014