X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy

由 Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh
出版 2016