X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy

بواسطة Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh
منشور في 2016

Development of the lithographic sources and processes for device fabrication

بواسطة Wong, Terence Kin Shun, Lee, Sing, Xu, Shuyan, Lee, Paul Choon Keat, Tan, Augustine Tuck Lee, Rawat, Rajdeep Singh, Liu, Mahe, Ostrikov, Kostyantyn, Vladimir Koudriachov, Li, Yin An
منشور في 2008