Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

بواسطة SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS, LEE, JAMES, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
منشور في 2012

Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

بواسطة SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS YOUG WEE, LEE, JAMES YONG MENG, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
منشور في 2012