Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM

by Liu, Binghai, Dong, Zhi Li, Hua, Younan, Fu, Chao, Li, Xiaomin, Tan, Pik Kee, Zhao, Yuzhe
Published 2019

The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM

by Liu, Binghai, Hua, Younan, Dong, Zhili, Tan, Pik Kee, Zhao, Yuzhe, Mo, Zhiqiang, Lam, Jeffrey, Mai, Zhihong
Published 2020

Electron radiation-induced material diffusion and nanocrystallization in nanostructured amorphous CoFeB thin film

by Liu, Binghai, Tahmasebi, Taiebeh, Ong, Kenny, Teo, Hanwei, Mo, Zhiqiang, Lam, Jeffrey, Tan, Pik Kee, Zhao, Yuzhe, Dong, Zhili, Houssameddine, Dimitri, Wang, Jacob, Xue, Junming, Mai, Zhihong
Published 2020