Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers

by Huang, Maggie Y. M., Lam, Jeffrey Chorkeung, Tan, Hao, Zhang, Fan, Sun, Handong, Shen, Zexiang, Mai, Zhihong
Published 2013

The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM

by Liu, Binghai, Hua, Younan, Dong, Zhili, Tan, Pik Kee, Zhao, Yuzhe, Mo, Zhiqiang, Lam, Jeffrey, Mai, Zhihong
Published 2020

Evidence of ultra-low-k dielectric material degradation and nanostructure alteration of the Cu/ultra-low-k interconnects in time-dependent dielectric breakdown failure

by Lam, Jeffrey C. K., Huang, Maggie Y. M., Ng, Tsu Hau, Mohammed Khalid Dawood, Zhang, Fan, Du, Anyan, Sun, Handong, Shen, Zexiang, Mai, Zhihong
Published 2013

Electron radiation-induced material diffusion and nanocrystallization in nanostructured amorphous CoFeB thin film

by Liu, Binghai, Tahmasebi, Taiebeh, Ong, Kenny, Teo, Hanwei, Mo, Zhiqiang, Lam, Jeffrey, Tan, Pik Kee, Zhao, Yuzhe, Dong, Zhili, Houssameddine, Dimitri, Wang, Jacob, Xue, Junming, Mai, Zhihong
Published 2020