ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

by Wang, Peihong, Du, Hejun
Published 2015

A ZnO driven silicon cantilever for nanoscale actuation

by Yuan, Yanhui, Du, Hejun, Wang, Peihong
Published 2013

Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

by Wang, Peihong, Du, Hejun, Shen, Shengnan, Zhang, Mingsheng, Liu, Bo
Published 2013

Preparation and characterization of ZnO microcantilever for nanoactuation

by Wang, Peihong, Du, Hejun, Shen, Shengnan, Zhang, Mingsheng, Liu, Bo
Published 2013

A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

by Yuan, Yanhui, Shyong Chow, Kun, Du, Hejun, Wang, Peihong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
Published 2013

A ZnO microcantilever for high-frequency nanopositioning : modeling, fabrication and characterization

by Yuan, Yanhui, Du, Hejun, Wang, Peihong, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
Published 2013

Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting

by Tao, Kai, Yi, Haiping, Tang, Lihua, Wu, Jin, Wang, Peihong, Wang, Nan, Hu, Liangxing, Fu, Yongqing, Miao, Jianmin, Chang, Honglong
Published 2020