A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

• Main Authors: Yuan, Yanhui, Shyong Chow, Kun, Du, Hejun, Wang, Peihong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Nanostructured materials
• Online Access: https://hdl.handle.net/10356/107347; http://hdl.handle.net/10220/18055; http://dx.doi.org/10.1080/19475411.2012.749959
• Institution: Nanyang Technological University

Zinc oxide (ZnO) thin film as a piezoelectric material for microelectromechanical system (MEMS) actuators and sensors was evaluated. ZnO thin films were deposited using radio frequency (RF) magnetron sputtering. Process parameters such as gas ratio, working pressure, and RF power were optimized for...