Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting

• Main Authors: Tao, Kai, Yi, Haiping, Tang, Lihua, Wu, Jin, Wang, Peihong, Wang, Nan, Hu, Liangxing, Fu, Yongqing, Miao, Jianmin, Chang, Honglong
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Mechanical engineering; ZnO Thin Films; Vibrational Energy Harvesting
• Online Access: https://hdl.handle.net/10356/144915
• Institution: Nanyang Technological University

Zinc oxide (ZnO) is an environmental-friendly semiconducting, piezoelectric and non-ferroelectric material, and plays an essential role for applications in microelectromechanical systems (MEMS). In this work, a fully integrated two-degree-of-freedom (2DOF) MEMS piezoelectric vibration energy harvest...