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Indium Zinc Oxide (IZO) is one of the TCO material that have high conductivity and transparency in the range of visible light. A variation of mass ratio is used to make the target, that are ZnO with In2O3 98%:2%, 95%:5%, and 92%:8%. The target then deposited using DC Sputtering method at 300OC tempe...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/18250 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
| Summary: | Indium Zinc Oxide (IZO) is one of the TCO material that have high conductivity and transparency in the range of visible light. A variation of mass ratio is used to make the target, that are ZnO with In2O3 98%:2%, 95%:5%, and 92%:8%. The target then deposited using DC Sputtering method at 300OC temperature for 2 hours. The optical characteristic is measured using UV-Vis spectrophotometer and the transmittance was obtained. IZO 5% has the highest transmittance which is above 60% at 400nm until 1100nm wavelength range. From the transmittance, energy band gap was obtained, that are 3.580eV for IZO 2%, 3.570eV for IZO 5% and 3.5598eV for IZO 8%. |
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