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Indium Zinc Oxide (IZO) is one of the TCO material that have high conductivity and transparency in the range of visible light. A variation of mass ratio is used to make the target, that are ZnO with In2O3 98%:2%, 95%:5%, and 92%:8%. The target then deposited using DC Sputtering method at 300OC tempe...

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Bibliographic Details
Main Author: DAVID (NIM : 10208035); Pembimbing : Dr. Euis Sustini, M.Si.; Dr. Fatimah A. Noor, M.Si.
Format: Final Project
Language:Indonesia
Online Access:https://digilib.itb.ac.id/gdl/view/18250
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Institution: Institut Teknologi Bandung
Language: Indonesia

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