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Indium Zinc Oxide (IZO) is one of the TCO material that have high conductivity and transparency in the range of visible light. A variation of mass ratio is used to make the target, that are ZnO with In2O3 98%:2%, 95%:5%, and 92%:8%. The target then deposited using DC Sputtering method at 300OC tempe...
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| Main Author: | |
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/18250 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
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