STRUCTURE CHARACTERIZATION ANALYZED OF ZINC OXIDE THIN FILMS DOPED INDIUM OXIDE (IN2O3) RESULTS OF DC SPUTTERING DEPOSITION
In this final project, we conducted IZO thin film deposition by DC sputtering deposition method. A thin layer of Indium Zinc Oxide is deposited with several variation of parameters such substrate temperature, and variations in composition of indium doped. In this research, indium composition was var...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/19202 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |