THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD
Aluminum Zinc Oxide (AZO) with 2 wt.%, 3 wt.%, and 5 wt.% composition, which have been grinded, heated, pressed, and re-heated, were grown on glass substrates with DC-sputtering deposition method. AZO thin films then were characterized by X-Raydiffraction (XRD), Scanning Electron Microscopy (SEM), a...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/20414 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |