THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD
Aluminum Zinc Oxide (AZO) with 2 wt.%, 3 wt.%, and 5 wt.% composition, which have been grinded, heated, pressed, and re-heated, were grown on glass substrates with DC-sputtering deposition method. AZO thin films then were characterized by X-Raydiffraction (XRD), Scanning Electron Microscopy (SEM), a...
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id-itb.:204142017-09-27T11:45:17ZTHE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD ISTI INDAH NURANI (NIM : 10208036); Pembimbing : Dr. Euis Sustini, PUTRI Indonesia Final Project INSTITUT TEKNOLOGI BANDUNG https://digilib.itb.ac.id/gdl/view/20414 Aluminum Zinc Oxide (AZO) with 2 wt.%, 3 wt.%, and 5 wt.% composition, which have been grinded, heated, pressed, and re-heated, were grown on glass substrates with DC-sputtering deposition method. AZO thin films then were characterized by X-Raydiffraction (XRD), Scanning Electron Microscopy (SEM), andSpectrophotometer UV-visible. The results show the profile of the AZO thin film such as crystalline size, particle size, transmittance, and also the thin film thickness. <br /> <br /> <br /> ... text |
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Aluminum Zinc Oxide (AZO) with 2 wt.%, 3 wt.%, and 5 wt.% composition, which have been grinded, heated, pressed, and re-heated, were grown on glass substrates with DC-sputtering deposition method. AZO thin films then were characterized by X-Raydiffraction (XRD), Scanning Electron Microscopy (SEM), andSpectrophotometer UV-visible. The results show the profile of the AZO thin film such as crystalline size, particle size, transmittance, and also the thin film thickness. <br />
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| format |
Final Project |
| author |
ISTI INDAH NURANI (NIM : 10208036); Pembimbing : Dr. Euis Sustini, PUTRI |
| spellingShingle |
ISTI INDAH NURANI (NIM : 10208036); Pembimbing : Dr. Euis Sustini, PUTRI THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD |
| author_facet |
ISTI INDAH NURANI (NIM : 10208036); Pembimbing : Dr. Euis Sustini, PUTRI |
| author_sort |
ISTI INDAH NURANI (NIM : 10208036); Pembimbing : Dr. Euis Sustini, PUTRI |
| title |
THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD |
| title_short |
THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD |
| title_full |
THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD |
| title_fullStr |
THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD |
| title_full_unstemmed |
THE INFLUENCE OF IMPURITY ON ALUMINIUM ZINC OXIDE (AZO) THIN FILMS GROWN BY WITH DC-SPUTTERING METHOD |
| title_sort |
influence of impurity on aluminium zinc oxide (azo) thin films grown by with dc-sputtering method |
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https://digilib.itb.ac.id/gdl/view/20414 |
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1822019207678656512 |