FABRICATION OF CoFe2O4 NANOSTRUCTURE BY NANOIMPRINT LITHOGRAPHY

• Main Author: LAMSINAR SIMAMORA (NIM : 20515043), ABEDNEGO
• Format: Theses
• Language: Indonesia
• Online Access: https://digilib.itb.ac.id/gdl/view/19782
• Institution: Institut Teknologi Bandung

Fabrication of ordered magnetic nanostructures has attracted considerable attention due to their potential utilization in magnetic recording, since such bitpatterned media (BPM) offer higher storage density by allowing 1 bit to be recorded in a single isolated magnetic island instead of in multiple magnetic grains as in the conventional hard drives. To obtain arrays of magnetic nanostructures, the low-cost and straightforward nanoimprint techniques have great advantages in large-scale manufacture as compared to the other common techniques such as electron beam lithography and photolithography. While most nanoimprint techniques of BPM involve physical vapor deposition or reactive ion etching through an imprinted template, very few work have used chemical solution deposition. Here we present an all-solution fabrication approach to ordered magnetic nanostructures. We started with preparing a polymer template using nanoimprint lithography. Subsequent sol-gel deposition and thermal treatment of the inorganic precursor transfer the template morphology to the final oxide structure. By properly tuning the processing conditions, CoFe2O4 stripes with good separation were obtained. The as-prepared nanopatterns exhibit better separation than the ones obtained by imprinting the precursor directly onto the substrate