THE EFFECT OF ALUMINIUM DOPING ON OPTICAL AND ELECTRICAL PROPERTIES OF ZNO THIN FILMS FOR PHOTODETECTOR APPLICATION
Undoped ZnO and Al-doped ZnO (AZO) thin films with a different concentrations of Al doping were successfully deposited on silicon substrates using direct current-unbalanced magnetron sputtering (DC-UBMS) method. The addition of Al doping with various concentrations on the ZnO thin film were performe...
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| Format: | Theses |
| Language: | Indonesia |
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| Online Access: | https://digilib.itb.ac.id/gdl/view/37883 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |