KONSTRUKSI ALAT METAL ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) DAN ANALIS STRUKTUR LAPISAN TIPIS ZNO YANG DITUMBUHKANNYA
<b>Abstract :</b><p align=\"justify\"> <br /> <br /> <br /> A new design of Metalorganic Chemical Vapor Deposition (MOCVD) equipment was constructed. The analysis of its construction showed that out put variables, i.e; deposition rate and atom compo...
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| Format: | Theses |
| Language: | Indonesia |
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| Online Access: | https://digilib.itb.ac.id/gdl/view/4679 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |