KONSTRUKSI ALAT METAL ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) DAN ANALIS STRUKTUR LAPISAN TIPIS ZNO YANG DITUMBUHKANNYA
<b>Abstract :</b><p align=\"justify\"> <br /> <br /> <br /> A new design of Metalorganic Chemical Vapor Deposition (MOCVD) equipment was constructed. The analysis of its construction showed that out put variables, i.e; deposition rate and atom compo...
Saved in:
| Main Author: | |
|---|---|
| Format: | Theses |
| Language: | Indonesia |
| Subjects: | |
| Online Access: | https://digilib.itb.ac.id/gdl/view/4679 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
Be the first to leave a comment!