FABRIKASI FOTORESEPTOR BERBASIS LAPISAN IPIS A-SI:H DAN PADUANNYA DENGAN REAKTOR PECVD GANDA
<b>Abstrack</b><p align=\"justify\"> <br /> Photoreceptor devices have been fabricated for positive corona in multilayered structure of glass/ZnO /i-a-SiC:H /i-a-Si:H /p-a-Si:H /AI by using dual chamber plasma enhanced chemical vapor deposition (PECVD ) method. 10%...
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| Main Author: | |
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/4797 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
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