FABRIKASI FOTORESEPTOR BERBASIS LAPISAN IPIS A-SI:H DAN PADUANNYA DENGAN REAKTOR PECVD GANDA

<b>Abstrack</b><p align=\"justify\"> <br /> Photoreceptor devices have been fabricated for positive corona in multilayered structure of glass/ZnO /i-a-SiC:H /i-a-Si:H /p-a-Si:H /AI by using dual chamber plasma enhanced chemical vapor deposition (PECVD ) method. 10%...

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Bibliographic Details
Main Author: Kade Suardana, I
Format: Theses
Language:Indonesia
Online Access:https://digilib.itb.ac.id/gdl/view/4797
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Institution: Institut Teknologi Bandung
Language: Indonesia

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