Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
10.1038/srep32716
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Nature Publishing Group
2020
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/182431 |
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| Institution: | National University of Singapore |