Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films

10.1038/srep32716

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Bibliographic Details
Main Authors:	Zhou, H.P, Xu, M, Xu, S, Liu, L.L, Liu, C.X, Kwek, L.C, Xu, L.X
Other Authors:	CENTRE FOR QUANTUM TECHNOLOGIES
Format:	Article
Published:	Nature Publishing Group 2020
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/182431
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Institution:	National University of Singapore

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