Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films

10.1038/srep32716

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Bibliographic Details
Main Authors:	Zhou, H.P, Xu, M, Xu, S, Liu, L.L, Liu, C.X, Kwek, L.C, Xu, L.X
Other Authors:	CENTRE FOR QUANTUM TECHNOLOGIES
Format:	Article
Published:	Nature Publishing Group 2020
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/182431
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1824312023-10-31T21:02:02Z Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films Zhou, H.P Xu, M Xu, S Liu, L.L Liu, C.X Kwek, L.C Xu, L.X CENTRE FOR QUANTUM TECHNOLOGIES 10.1038/srep32716 Scientific Reports 6 32716 2020-10-31T11:27:08Z 2020-10-31T11:27:08Z 2016 Article Zhou, H.P, Xu, M, Xu, S, Liu, L.L, Liu, C.X, Kwek, L.C, Xu, L.X (2016). Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films. Scientific Reports 6 : 32716. ScholarBank@NUS Repository. https://doi.org/10.1038/srep32716 2045-2322 https://scholarbank.nus.edu.sg/handle/10635/182431 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ Nature Publishing Group Unpaywall 20201031
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1038/srep32716
author2	CENTRE FOR QUANTUM TECHNOLOGIES
author_facet	CENTRE FOR QUANTUM TECHNOLOGIES Zhou, H.P Xu, M Xu, S Liu, L.L Liu, C.X Kwek, L.C Xu, L.X
format	Article
author	Zhou, H.P Xu, M Xu, S Liu, L.L Liu, C.X Kwek, L.C Xu, L.X
spellingShingle	Zhou, H.P Xu, M Xu, S Liu, L.L Liu, C.X Kwek, L.C Xu, L.X Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
author_sort	Zhou, H.P
title	Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
title_short	Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
title_full	Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
title_fullStr	Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
title_full_unstemmed	Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films
title_sort	hydrogen-plasma-induced rapid, low-temperature crystallization of ?m-thick a-si:h films
publisher	Nature Publishing Group
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/182431
_version_	1781792596877639680

Hydrogen-plasma-induced Rapid, Low-Temperature Crystallization of ?m-thick a-Si:H Films

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