DC SPUTTERED HAFNIUM NITRIDE AS THE PH SENSING MEMBRANE IN THE EGFET DEVICE
Kidney stone is the most common urologic disease with a worldwide prevalence of around 12%. Most of the early conditions are asymptomatic and it urged the development of early detection. Calcium and pH played important roles as biomarkers through regulating the stone formation. However, the current...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/77528 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
| Summary: | Kidney stone is the most common urologic disease with a worldwide prevalence of around 12%. Most of the early conditions are asymptomatic and it urged the development of early detection. Calcium and pH played important roles as biomarkers through regulating the stone formation. However, the current urinalysis still needs improvement, and an extended gate-field effect transistor (EGFET) would be a potential alternative. Within this research, hafnium nitride (HfN) was sputtered on the glass substrate with three different percentages of nitrogen based on its flow rate: 12% N2 (HfN 12%), 20% N2 (HfN 20%), and 40% N2 (HfN 40%). HfN 12% exhibited the highest hafnium and nitrogen atomic percentage compared to the others from XPS spectra. The roughness recorded with AFM for HfN 12%, 20%, and 40% are 0.713 nm, 0.721 nm, and 0.524 nm respectively. The HfN was explored as a sensing membrane for pH and calcium through an EGFET that was recorded with a constant current constant voltage (CVCC) circuit system. The highest sensitivity was showed by HfN 12% with the value of 49.95 mV/pH (R2 99.6%) and successfully maintained its sensitivity above 45 mV/pH (R2 >95%) for a consecutive usage in 16 days. The HfN 12% also showed a linear result in calcium-sensing with a sensitivity around 13.33 mV/pCa (R2 99.1%). In summary, the fabricated HfN 12% demonstrated the best performance as a sensing membrane in an EGFET device with good sensitivity towards pH and promising results for calcium sensing.
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