Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying

• Main Authors: Gu, Zhiqing, Huang, Haihua, Zhang, Sam, Wang, Xiaoyi, Gao, Jing, Zhao, Lei, Zheng, Weitao, Hu, Chaoquan
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2017
• Subjects: Tantalum; Reflectivity
• Online Access: https://hdl.handle.net/10356/83578; http://hdl.handle.net/10220/42668
• Institution: Nanyang Technological University

It is found that incorporation of tantalum in a hafnium nitride film induces a tunable optical reflectivity and improves the hardness. The underlying mechanism can be illustrated by a combination of experiments and first-principles calculations. It is shown that the evolution of optical reflectivity...