Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying
It is found that incorporation of tantalum in a hafnium nitride film induces a tunable optical reflectivity and improves the hardness. The underlying mechanism can be illustrated by a combination of experiments and first-principles calculations. It is shown that the evolution of optical reflectivity...
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| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/83578 http://hdl.handle.net/10220/42668 |
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| Institution: | Nanyang Technological University |
| Language: | English |