�THE EFFECT OF DC-SPUTTERING PARAMETERS AND Al DOPING ON CONDUCTIVITY AND TRANSPARENCY OF TiO2 THIN FILMS�

�THE EFFECT OF DC-SPUTTERING PARAMETERS AND Al DOPING ON CONDUCTIVITY AND TRANSPARENCY OF TiO2 THIN FILMS�

Titanium dioxide (TiO2) thin films have been deposited on glass substrates under various conditions by using a homemade DC reactive sputtering technique. The TiO2 thin film has unique characteristics and economical alternative material for transparent conductivity oxide thin films compared with othe...

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Bibliographic Details
Main Authors: , laith rabih mohammed, , Dr. Pekik Nurwantoro
Format: Theses and Dissertations NonPeerReviewed
Published: [Yogyakarta] : Universitas Gadjah Mada 2013
Subjects:
ETD
Online Access:https://repository.ugm.ac.id/126204/
http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=66407
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Institution: Universitas Gadjah Mada

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https://repository.ugm.ac.id/126204/
http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=66407

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