Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering
The 2 wt% aluminum-doped zinc oxide films (AZO) was sputtered on corning glass plate at temperatures of 30-200 °C by DC magnetron sputtering using ceramic target. The microstructures and electrical resistivity of thin films were investigated by scanning electron microscope (SEM) and the van der Pauw...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33748295592&partnerID=40&md5=b92a90d254bc0402b8589e8a7bd5d2b0 http://cmuir.cmu.ac.th/handle/6653943832/5056 |
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| Institution: | Chiang Mai University |
| Language: | English |