Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering
The 2 wt% aluminum-doped zinc oxide films (AZO) was sputtered on corning glass plate at temperatures of 30-200 °C by DC magnetron sputtering using ceramic target. The microstructures and electrical resistivity of thin films were investigated by scanning electron microscope (SEM) and the van der Pauw...
Saved in:
Main Authors: | Tohsophon T., Sirikulrat N. |
---|---|
Format: | Article |
Language: | English |
Published: |
2014
|
Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33748295592&partnerID=40&md5=b92a90d254bc0402b8589e8a7bd5d2b0 http://cmuir.cmu.ac.th/handle/6653943832/5056 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Chiang Mai University |
Language: | English |
Similar Items
-
Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering
by: T. Tohsophon, et al.
Published: (2018) -
Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering
by: Tohsophon T., et al.
Published: (2014) -
Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering
by: T. Tohsophon, et al.
Published: (2018) -
Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering
by: Tohsophon T., et al.
Published: (2014) -
Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering
by: T. Tohsophon, et al.
Published: (2018)