High rate direct current magnetron sputtered and texture-etched zinc oxide films for silicon thin film solar cells

• Main Authors: Tohsophon T., Hupkes J., Siekmann H., Rech B., Schultheis M., Sirikulrat N.
• Format: Article
• Language: English
• Published: 2014
• Online Access: http://www.scopus.com/inward/record.url?eid=2-s2.0-42649137956&partnerID=40&md5=75147d66628271970f9968d0bc16e407; http://cmuir.cmu.ac.th/handle/6653943832/5534
• Institution: Chiang Mai University

Aluminum-doped zinc oxide (AZO) films were prepared by in-line direct current (dc) magnetron sputtering on glass substrates. Four types of ceramic targets with 0.5 wt.% or 1 wt.% of aluminum oxide and different preparation methods, namely normal sintered, soft sintered and hot pressed, were employed...