High rate direct current magnetron sputtered and texture-etched zinc oxide films for silicon thin film solar cells
Aluminum-doped zinc oxide (AZO) films were prepared by in-line direct current (dc) magnetron sputtering on glass substrates. Four types of ceramic targets with 0.5 wt.% or 1 wt.% of aluminum oxide and different preparation methods, namely normal sintered, soft sintered and hot pressed, were employed...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-42649137956&partnerID=40&md5=75147d66628271970f9968d0bc16e407 http://cmuir.cmu.ac.th/handle/6653943832/5534 |
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| Institution: | Chiang Mai University |
| Language: | English |