Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering

Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering

The damp heat stability and subsequent vacuum annealing behavior of aluminum doped zinc oxide (AZO) films was investigated using Hall effect measurements, X-ray diffraction (XRD) and optical spectrometry techniques. The AZO films were deposited on glass or silicon wafers using reactive and non-react...

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Bibliographic Details
Main Authors: T. Tohsophon, J. Hüpkes, S. Calnan, W. Reetz, B. Rech, W. Beyer, N. Sirikulrat
Format: Journal
Published: 2018
Subjects:
Materials Science
Physics and Astronomy
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33646538800&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/61741
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Institution: Chiang Mai University

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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33646538800&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/61741

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