Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering
The damp heat stability and subsequent vacuum annealing behavior of aluminum doped zinc oxide (AZO) films was investigated using Hall effect measurements, X-ray diffraction (XRD) and optical spectrometry techniques. The AZO films were deposited on glass or silicon wafers using reactive and non-react...
محفوظ في:
المؤلفون الرئيسيون: | T. Tohsophon, J. Hüpkes, S. Calnan, W. Reetz, B. Rech, W. Beyer, N. Sirikulrat |
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التنسيق: | دورية |
منشور في: |
2018
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الموضوعات: | |
الوصول للمادة أونلاين: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33646538800&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/61741 |
الوسوم: |
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المؤسسة: | Chiang Mai University |
مواد مشابهة
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Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering
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Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering
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Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering
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Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering
بواسطة: Tohsophon T., وآخرون
منشور في: (2014) -
Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering
بواسطة: T. Tohsophon, وآخرون
منشور في: (2018)