Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating

Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating

10.1063/1.4795763

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Bibliographic Details
Main Authors: Yang, W.F., Liu, Z.G., Wu, Z.Y., Hong, M.H., Wang, C.F., Lee, A.Y.S., Gong, H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82627
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82627

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