Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating
10.1063/1.4795763
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82627 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-82627 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-826272023-10-29T22:40:18Z Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating Yang, W.F. Liu, Z.G. Wu, Z.Y. Hong, M.H. Wang, C.F. Lee, A.Y.S. Gong, H. ELECTRICAL & COMPUTER ENGINEERING MATERIALS SCIENCE AND ENGINEERING 10.1063/1.4795763 Applied Physics Letters 102 11 - APPLA 2014-10-07T04:31:36Z 2014-10-07T04:31:36Z 2013-03-18 Article Yang, W.F., Liu, Z.G., Wu, Z.Y., Hong, M.H., Wang, C.F., Lee, A.Y.S., Gong, H. (2013-03-18). Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating. Applied Physics Letters 102 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4795763 00036951 http://scholarbank.nus.edu.sg/handle/10635/82627 000316544900026 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.4795763 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Yang, W.F. Liu, Z.G. Wu, Z.Y. Hong, M.H. Wang, C.F. Lee, A.Y.S. Gong, H. |
| format |
Article |
| author |
Yang, W.F. Liu, Z.G. Wu, Z.Y. Hong, M.H. Wang, C.F. Lee, A.Y.S. Gong, H. |
| spellingShingle |
Yang, W.F. Liu, Z.G. Wu, Z.Y. Hong, M.H. Wang, C.F. Lee, A.Y.S. Gong, H. Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| author_sort |
Yang, W.F. |
| title |
Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| title_short |
Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| title_full |
Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| title_fullStr |
Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| title_full_unstemmed |
Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| title_sort |
low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82627 |
| _version_ |
1781784186071285760 |