Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film

10.1063/1.2773637

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Bibliographic Details
Main Authors: Liu, H.F., Chua, S.J., Hu, G.X., Gong, H., Xiang, N.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57188
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Institution: National University of Singapore