Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film
10.1063/1.2773637
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sg-nus-scholar.10635-571882023-10-27T08:08:33Z Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. MATERIALS SCIENCE AND ENGINEERING ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2773637 Journal of Applied Physics 102 4 - JAPIA 2014-06-17T03:03:17Z 2014-06-17T03:03:17Z 2007 Article Liu, H.F., Chua, S.J., Hu, G.X., Gong, H., Xiang, N. (2007). Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film. Journal of Applied Physics 102 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2773637 00218979 http://scholarbank.nus.edu.sg/handle/10635/57188 000249156200048 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1063/1.2773637 |
| author2 |
MATERIALS SCIENCE AND ENGINEERING |
| author_facet |
MATERIALS SCIENCE AND ENGINEERING Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. |
| format |
Article |
| author |
Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. |
| spellingShingle |
Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| author_sort |
Liu, H.F. |
| title |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_short |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_full |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_fullStr |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_full_unstemmed |
Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film |
| title_sort |
radio-frequency magnetron sputtering and wet thermal oxidation of zno thin film |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57188 |
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1781781363468271616 |