Radio-frequency magnetron sputtering and wet thermal oxidation of ZnO thin film
10.1063/1.2773637
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Main Authors: | Liu, H.F., Chua, S.J., Hu, G.X., Gong, H., Xiang, N. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/57188 |
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Institution: | National University of Singapore |
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