Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering

• Main Authors: Tohsophon T., Hupkes J., Calnan S., Reetz W., Rech B., Beyer W., Sirikulrat N.
• Format: Article
• Language: English
• Published: 2014
• Online Access: http://www.scopus.com/inward/record.url?eid=2-s2.0-33646538800&partnerID=40&md5=77552c4f720a668fe34a5548b9c92d2d; http://cmuir.cmu.ac.th/handle/6653943832/5105
• Institution: Chiang Mai University

The damp heat stability and subsequent vacuum annealing behavior of aluminum doped zinc oxide (AZO) films was investigated using Hall effect measurements, X-ray diffraction (XRD) and optical spectrometry techniques. The AZO films were deposited on glass or silicon wafers using reactive and non-react...