Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering
The damp heat stability and subsequent vacuum annealing behavior of aluminum doped zinc oxide (AZO) films was investigated using Hall effect measurements, X-ray diffraction (XRD) and optical spectrometry techniques. The AZO films were deposited on glass or silicon wafers using reactive and non-react...
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Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
2014
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Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33646538800&partnerID=40&md5=77552c4f720a668fe34a5548b9c92d2d http://cmuir.cmu.ac.th/handle/6653943832/5105 |
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Institution: | Chiang Mai University |
Language: | English |