Heat-assisted μ-electrical discharge machining of silicon
Micro-electrical discharge machining (μEDM) is an unconventional machining method that is suitable for machining of conductive materials including highly doped silicon (Si) wafers. This paper reports a novel method of heat-assisted μEDM machining of Si wafers by varying the temperature to increase...
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Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Springer Nature
2021
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Subjects: | |
Online Access: | http://irep.iium.edu.my/88380/1/88380_Heat-assisted%20%CE%BC-electrical.pdf http://irep.iium.edu.my/88380/ https://link.springer.com/article/10.1007/s00170-021-06734-y |
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Institution: | Universiti Islam Antarabangsa Malaysia |
Language: | English |