Effects of background gases and pressure in pulsed laser deposition of Al-doped ZnO

Effects of background gases and pressure in pulsed laser deposition of Al-doped ZnO

Background gases (O-2, He or Ar) with the pressure from similar to 10(-3) Pa to 133.3 Pa are used in 355 nm laser deposition of Al-doped ZnO at room temperature. The effects of these gases and pressure on plasma formation are studied by optical emission spectroscopy (OES) and time of flight (TOF) me...

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Bibliographic Details
Main Authors: Kek, Reeson, Yap, Seong Ling, Koh, Song Foo, Nee, Chen Hon, Tou, Teck Yong, Yap, Seong Shan
Format: Article
Published: Elsevier 2020
Subjects:
Q Science (General)
QC Physics
Online Access:http://eprints.um.edu.my/36723/
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Institution: Universiti Malaya

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http://eprints.um.edu.my/36723/

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