Effects of background gases and pressure in pulsed laser deposition of Al-doped ZnO

• Main Authors: Kek, Reeson, Yap, Seong Ling, Koh, Song Foo, Nee, Chen Hon, Tou, Teck Yong, Yap, Seong Shan
• Format: Article
• Published: Elsevier 2020
• Subjects: Q Science (General); QC Physics
• Online Access: http://eprints.um.edu.my/36723/
• Institution: Universiti Malaya

Background gases (O-2, He or Ar) with the pressure from similar to 10(-3) Pa to 133.3 Pa are used in 355 nm laser deposition of Al-doped ZnO at room temperature. The effects of these gases and pressure on plasma formation are studied by optical emission spectroscopy (OES) and time of flight (TOF) me...