Effects of background gases and pressure in pulsed laser deposition of Al-doped ZnO
Background gases (O-2, He or Ar) with the pressure from similar to 10(-3) Pa to 133.3 Pa are used in 355 nm laser deposition of Al-doped ZnO at room temperature. The effects of these gases and pressure on plasma formation are studied by optical emission spectroscopy (OES) and time of flight (TOF) me...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Published: |
Elsevier
2020
|
| Subjects: | |
| Online Access: | http://eprints.um.edu.my/36723/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universiti Malaya |