Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications

Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications

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Bibliographic Details
Main Authors: Nashrul Fazli, Mohd Nasir, Charan, M. Shah, Leech, Patrick William, Reeves, Geoffrey K., Pirogova, Elena, Istivan, Taghrid S, Tanner, Philip G., Holland, Anthony Stephen
Other Authors: nashrul@unimap.edu.my
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Subjects:
Silicon Carbide
Microfabrication
Micromachining
Membrane
Wet etching
Reactive ion etching
X-Ray Photoelectron Spectroscopy (XPS)
Biomedical microdevices
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/21405
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/21405

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