Silica microchannel fabrication using fluorine based rie with alas a mask

Silica microchannel fabrication using fluorine based rie with alas a mask

Link to publisher's homepage at www.aensiweb.com/‎

Saved in:

Bibliographic Details
Main Authors:	Wan Mokhzani, Wan Norhaimi, Retnasamy, Vithyacharan, Zaliman, Sauli, Assoc. Prof. Dr., Taniselass, Steven, Ahmad Husni, Mohd Shapri, Norazeani, Abdul Rahman, Abdul Halis, Abdul Aziz
Other Authors:	wanmokhdzani@unimap.edu.my
Format:	Article
Language:	English
Published:	INSInet Publications 2013
Subjects:	Reactive Ion Etching Process (RIE) Silica microchannel Fabrication process Microfluidics
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/26628
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Universiti Malaysia Perlis
Language:	English

Description
Summary:	Link to publisher's homepage at www.aensiweb.com/‎