Silica microchannel fabrication using fluorine based rie with alas a mask

• Main Authors: Wan Mokhzani, Wan Norhaimi, Retnasamy, Vithyacharan, Zaliman, Sauli, Assoc. Prof. Dr., Taniselass, Steven, Ahmad Husni, Mohd Shapri, Norazeani, Abdul Rahman, Abdul Halis, Abdul Aziz
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: INSInet Publications 2013
• Subjects: Reactive Ion Etching Process (RIE); Silica microchannel; Fabrication process; Microfluidics
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/26628
• Institution: Universiti Malaysia Perlis

Link to publisher's homepage at www.aensiweb.com/‎